Self-termination of contactless photo-electrochemical (PEC) etching on aluminum gallium nitride/gallium nitride heterostructures
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چکیده
منابع مشابه
Highly Chemical Reactive Ion Etching of Gallium Nitride
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ژورنال
عنوان ژورنال: Applied Physics Express
سال: 2020
ISSN: 1882-0778,1882-0786
DOI: 10.35848/1882-0786/ab6f28